Thermal Imprint Process of Parylene for MEMS Applications
Youn, Sung Won, Goto, Hiroshi, Takahashi, Masaharu, Ogiwara, M., Maeda, RyutaroVolume:
340-341
Year:
2007
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.340-341.931
File:
PDF, 8.60 MB
english, 2007