Fabrication of silicon microring resonator with smooth...

Fabrication of silicon microring resonator with smooth sidewalls

Feng, Junbo
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Volume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3258487
Date:
October, 2009
File:
PDF, 319 KB
english, 2009
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