Optimization of plasma effect in laser drilling of high...

Laser Physics 2015 / 05 Vol. 25; Iss. 5

Optimization of plasma effect in laser drilling of high aspect ratio microvias

Tokarev, V N, Cheshev, E A, Bezotosnyi, V V, Khomich, V Yu, Mikolutskiy, S I, Vasil’yeva, N V
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Volume:
25
Language:
english
Journal:
Laser Physics
DOI:
10.1088/1054-660X/25/5/056003
Date:
May, 2015
File:
PDF, 458 KB
english, 2015
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