Effects of Particle Concentration on Chemical Mechanical...

Effects of Particle Concentration on Chemical Mechanical Planarization

Cooper, Kevin, Cooper, Jennifer, Groschopf, Johannes, Flake, John, Solomentsev, Yuri, Farkas, Janos
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Volume:
5
Year:
2002
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1517772
File:
PDF, 501 KB
english, 2002
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