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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Micromolding: a powerful tool for large-scale production of precise microstructures
Weber, Lutz, Ehrfeld, Wolfgang, Freimuth, Herbert, Lacher, Manfred, Lehr, Heinz, Pech, Bernhard, Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251203
File:
PDF, 993 KB
english, 1996