Fabrication and characterization of an all optically...

Fabrication and characterization of an all optically addressed micromirror array

Mathur, Vaibhav, Vangala, Shiva, Khoury, Jed
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Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.1.015501
Date:
January, 2015
File:
PDF, 2.92 MB
english, 2015
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