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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] MOEMS and Miniaturized Systems XIV - CMOS compatible fabrication of 3D photonic crystals by nanoimprint lithography
Piyawattanametha, Wibool, Park, Yong-Hwa, Eibelhuber, M., Uhrmann, T., Glinsner, T.Volume:
9375
Year:
2015
Language:
english
DOI:
10.1117/12.2084583
File:
PDF, 2.12 MB
english, 2015