SPIE Proceedings [SPIE First International Symposium on Laser Precision Microfabrication (LPM2000) - Omiya, Saitama, Japan (Wednesday 14 June 2000)] First International Symposium on Laser Precision Microfabrication - Pulsed laser nitridation of InP
Aoki, Naoko, Akane, Toshimitsu, Sugioka, Koji, Toyoda, Koichi, Dubowski, Jan J., Midorikawa, Katsumi, Miyamoto, Isamu, Sugioka, Koji, Sigmon, Thomas W.Volume:
4088
Year:
2000
Language:
english
DOI:
10.1117/12.405737
File:
PDF, 579 KB
english, 2000