Preparation of Al2O3 and AlN Nanotubes by Atomic Layer...

MRS Proceedings 2012 / 1 Vol. 1408

Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition

Ozgit, Cagla, Kayaci, Fatma, Donmez, Inci, Cagatay, Engin, Uyar, Tamer, Biyikli, Necmi
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Volume:
1408
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.38
Date:
January, 2012
File:
PDF, 329 KB
english, 2012
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