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SPIE Proceedings [SPIE International Conference on Optical Instrumentation and Technology - Shanghai, China (Monday 19 October 2009)] 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems - Ellipsometric data inversion of absorbing films by simulated annealing - simplex hybrid algorithm
Huang, Zuohuah, Wang, Lijuan, He, Zhenjiang, Ye, Shenghua, Zhang, Guangjun, Ni, JunVolume:
7511
Year:
2009
Language:
english
DOI:
10.1117/12.837845
File:
PDF, 287 KB
english, 2009