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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Interferometry XVI: Techniques and Analysis - Self calibration for slope-dependent errors in optical profilometry by using the random ball test
Zhou, Yue, Ghim, Young-Sik, Davies, Angela, Schmit, Joanna, Creath, Katherine, Towers, Catherine E., Burke, JanVolume:
8493
Year:
2012
Language:
english
DOI:
10.1117/12.928504
File:
PDF, 362 KB
english, 2012