SPIE Proceedings [SPIE Microtechnologies for the New...

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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - Micromachined IR-source with excellent blackbody like behaviour (Invited Paper)

Konz, W., Hildenbrand, J., Bauersfeld, M., Hartwig, S., Lambrecht, A., Lehmann, V., Wollenstein, J., Cane, Carles, Chiao, Jung-Chih, Vidal Verdu, Fernando
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Volume:
5836
Year:
2005
Language:
english
DOI:
10.1117/12.608712
File:
PDF, 706 KB
english, 2005
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