SPIE Proceedings [SPIE International Symposium on Polarization Analysis and Applications to Device Technology - Yokohama, Japan (Wednesday 12 June 1996)] International Symposium on Polarization Analysis and Applications to Device Technology - Development of EUV free-standing multilayer polarizers
Hu, Weibing, Yamamoto, Masaki, Watanabe, Makoto, Yoshizawa, Toru, Yokota, HideshiVolume:
2873
Year:
1996
Language:
english
DOI:
10.1117/12.246184
File:
PDF, 226 KB
english, 1996