SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - High-speed anisotropic etching of quartz using SF6/C4F8/Ar/O2 based chemistry in inductively coupled plasma reactive ion etching system
Goyal, Abhijat, Hood, Vincent, Tadigadapa, Srinivas, Tanner, Danelle M., Ramesham, RajeshuniVolume:
6111
Year:
2006
Language:
english
DOI:
10.1117/12.657730
File:
PDF, 1.24 MB
english, 2006