Simulation study of repeatability and bias in the critical...

Simulation study of repeatability and bias in the critical dimension scanning electron microscope

Villarrubia, John S.
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Volume:
4
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2037447
Date:
July, 2005
File:
PDF, 587 KB
english, 2005
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