Focused electron beam induced deposition: A perspective

Beilstein Journal of Nanotechnology 2012 / 08 Vol. 3

Focused electron beam induced deposition: A perspective

Huth, Michael, Porrati, Fabrizio, Schwalb, Christian, Winhold, Marcel, Sachser, Roland, Dukic, Maja, Adams, Jonathan, Fantner, Georg
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Volume:
3
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.3.70
Date:
August, 2012
File:
PDF, 740 KB
english, 2012
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