SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 4 August 1996)] Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays - Confocal microscope 3D visualizing method for fine surface characterization of microstructures

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