![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 4 August 1996)] Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays - Confocal microscope 3D visualizing method for fine surface characterization of microstructures
Ichikawa, Yoshiharu, Toriwaki, Jun-ichiro, Stover, John C.Volume:
2862
Year:
1996
Language:
english
DOI:
10.1117/12.256194
File:
PDF, 527 KB
english, 1996