SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII - Fabrication of the nanoimprint template with periodic structures
von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C., Liu, Quan, Wu, Jianhong, Cheng, YuVolume:
8974
Year:
2014
Language:
english
DOI:
10.1117/12.2039584
File:
PDF, 1.85 MB
english, 2014