High-precision control of piezoelectric nanopositioning...

Smart Materials and Structures 2014 / 10 Vol. 23; Iss. 10

High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer

Gu, Guo-Ying, Zhu, Li-Min, Su, Chun-Yi
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Volume:
23
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/23/10/105007
Date:
October, 2014
File:
PDF, 1.84 MB
english, 2014
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