[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Effects of TiCl4-Based PECVD-Ti/CVD-TiN Barrier Layers on the BF2-Doped Si for Contact Plug Technology
Huang, Tsai-Yu, Liang, Wen-Ping, Su, Kuo-Hui, Wu, Chang-Rong, Lin, Yu-Chang, Satoshi, Wakabayashi, Lin, Jeng PingVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2790405
File:
PDF, 398 KB
english, 2007