Traceable pitch metrology: supporting the development of...

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 03 Vol. 11; Iss. 1

Traceable pitch metrology: supporting the development of patterned media and more

Chernoff, Donald A.
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.1.011008
Date:
March, 2012
File:
PDF, 3.87 MB
english, 2012
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