Non-Contact Measurement of Dielectric Constant for a...

Non-Contact Measurement of Dielectric Constant for a Nanometer-Thick Polymer Film

Park, Gun Wook, Hur, Young June, Kim, Jae Ho, Kim, Sung Hoon, Keum, Sam Rok, Koh, Kwang Nak
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Volume:
270-273
Year:
2004
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.270-273.1143
File:
PDF, 363 KB
english, 2004
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