Diffusion of Dopants and Impurities in Device Structures of...

Defect and Diffusion Forum 2001 Vol. 194-199

Diffusion of Dopants and Impurities in Device Structures of SiC, SiGe and Si

Janson, Martin S., Linnarsson, Margareta K., Christensen, J.S., Lévêque, P., Kuznetsov, Andrej Yu., Radamson, H.H., Hallén, Anders, Nylandsted-Larsen, Arne, Svensson, Bengt G.
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Volume:
194-199
Year:
2001
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.194-199.597
File:
PDF, 745 KB
english, 2001
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