Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer...

Materials Science Forum 2013 / 1 Vol. 740-742

Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress

Anzalone, Ruggero, Camarda, Massimo, Auditore, Alessandro, Piluso, Nicolò, Severino, Andrea, La Magna, Antonino, D'Arrigo, Giuseppe, La Via, Francesco
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Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.301
Date:
January, 2013
File:
PDF, 824 KB
english, 2013
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