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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - Microstructuring by excimer laser
Harvey, Erol C., Rumsby, Phil T., Gower, Malcolm C., Remnant, Jason L., Markus, Karen W.Volume:
2639
Year:
1995
Language:
english
DOI:
10.1117/12.221283
File:
PDF, 1.18 MB
english, 1995