SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Alternative Lithographic Technologies VI - Nanoimprint lithography process chains for the fabrication of micro- and nanodevices
Resnick, Douglas J., Bencher, Christopher, Schift, HelmutVolume:
9049
Year:
2014
Language:
english
DOI:
10.1117/12.2048517
File:
PDF, 2.78 MB
english, 2014