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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII - Micro-optics fabrication by mask-based and mask-less mixed lithography process towards 3D optical circuits
von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C., Summitt, Chris, Wang, Sunglin, Johnson, Lee, Zaverton, Melissa, Ge, Tao, Milster, Tom, Takashima, YuzuruVolume:
8974
Year:
2014
Language:
english
DOI:
10.1117/12.2045234
File:
PDF, 540 KB
english, 2014