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Comparison of different metal film thicknesses of cyclic olefin copolymer–substrate polymerase chain-reaction chips with single-side and double-side heaters
Chung, Yung-ChiangVolume:
9
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3455371
Date:
July, 2010
File:
PDF, 750 KB
english, 2010