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SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - Optical measurement methods to study dynamic behavior in MEMS
Rembe, Christian, Kant, Rishi, Muller, Richard S., Gorecki, Christophe, Jueptner, Werner P. O., Kujawinska, MalgorzataVolume:
4400
Year:
2001
Language:
english
DOI:
10.1117/12.445595
File:
PDF, 754 KB
english, 2001