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SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Dry etching of high-aspect ratio contact holes
Wiepking, Mark, LeVan, M., Mayo, Phyllis, Bondur, James A., Turner, Terry R.Volume:
1392
Year:
1991
Language:
english
DOI:
10.1117/12.48909
File:
PDF, 1.04 MB
english, 1991