SPIE Proceedings [SPIE Seventh International Conference on Thin Film Physics and Applications - Shanghai, China (Friday 24 September 2010)] Seventh International Conference on Thin Film Physics and Applications - Fabrication and quantitative characterization of super smooth surface with sub-nanometer roughness
Shen, Zhengxiang, Ma, Bin, Ding, Tao, Wang, Xiaoqiang, Wang, ZhanShan, Wang, Lishuan, Liu, Huasong, Ji, Yiqin, Chu, Junhao, Wang, ZhanshanVolume:
7995
Year:
2011
Language:
english
DOI:
10.1117/12.888916
File:
PDF, 730 KB
english, 2011