SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Patterning of diamond films by RIE and its MEMS applications
Ding, Guifu, Yao, Jinyuan, Yu, Aibin, Zhao, Xiaolin, Wang, Li, Shen, Tianhui, Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396465
File:
PDF, 916 KB
english, 2000