Physical characterization of nanoimprinted polymer nanostructures using visible light angular scatterometry
Al-Assaad, Rayan M.Volume:
7
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2894772
Date:
January, 2008
File:
PDF, 886 KB
english, 2008