Distribution of Hydrogen- and Vacancy-Related Donor and...

MRS Proceedings 2009 / 1 Vol. 1195

Distribution of Hydrogen- and Vacancy-Related Donor and Acceptor States in Helium-Implanted and Plasma-Hydrogenated Float-Zone Silicon

Job, Reinhart, Niedernostheide, Franz-Josef, Schulze, Hans-Joachim, Schulze, Holger
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Volume:
1195
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1195-B11-02
Date:
January, 2009
File:
PDF, 109 KB
english, 2009
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