Characteristics of polycrystalline silicon thin-film...

Characteristics of polycrystalline silicon thin-film transistors with thin oxide/nitride gate structures

Cheng, Huang-Chung
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Volume:
32
Year:
1993
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/12.143982
File:
PDF, 233 KB
english, 1993
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