Oxidation Behaviors of PVD TiAlN Films

Key Engineering Materials 1997 Vol. 132-136

Oxidation Behaviors of PVD TiAlN Films

Lii, Ding-Fwu, Huang, Jow Lay, Shew, Bor-Yuan
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Volume:
132-136
Year:
1997
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.132-136.1505
File:
PDF, 164 KB
1997
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