SPIE Proceedings [SPIE Electronic Imaging '97 - San Jose, CA (Saturday 8 February 1997)] Active Matrix Liquid Crystal Displays Technology and Applications - Enhanced hydrogenation in polycrystalline Si thin films using ultrasound treatment
Ostapenko, Sergei, Koshka, Yaroslav, Jastrzebski, Lubek, Smeltzer, Ronald K., Voutsas, Tolis, King, Tsu-JaeVolume:
3014
Year:
1997
Language:
english
DOI:
10.1117/12.270294
File:
PDF, 381 KB
english, 1997