SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Micromachining Technology for Micro-Optics and Nano-Optics II - MEMS-based lithography for the fabrication of micro-optical components
Erdmann, Lars H., Deparnay, Arnaud, Wirth, Falk, Brunner, Robert, Johnson, Eric G., Nordin, Gregory P.Volume:
5347
Year:
2003
Language:
english
DOI:
10.1117/12.524447
File:
PDF, 289 KB
english, 2003