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Accurate measurement of very small line patterns in critical dimension scanning electron microscopy using model-based library matching technique
Shishido, ChieVolume:
10
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3541780
Date:
January, 2011
File:
PDF, 1.12 MB
english, 2011