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SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Simulation and optimization of DPP hydrodynamics and radiation transport for EUV lithography devices
Hassanein, Ahmed, Sizyuk, Valeryi, Tolkach, Vladimir, Morozov, Vitali, Sizyuk, T., Rice, Bryan J., Bakshi, Vivek, Mackay, R. ScottVolume:
5374
Year:
2004
Language:
english
DOI:
10.1117/12.534269
File:
PDF, 726 KB
english, 2004