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Full-field chromatic confocal surface profilometry employing digital micromirror device correspondence for minimizing lateral cross talks
Chen, Liang-ChiaVolume:
51
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.OE.51.8.081507
Date:
May, 2012
File:
PDF, 3.74 MB
english, 2012