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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Design for Manufacturability through Design-Process Integration VI - Model-based searching method to find the integrated critical failure on the wafer
Kang, Bong-Soo, Chung, No-Young, Park, Hyung-Kwan, Lee, Suk-Joo, Ku, Ja-Hum, Mason, Mark E.Volume:
8327
Year:
2012
Language:
english
DOI:
10.1117/12.917881
File:
PDF, 486 KB
english, 2012