SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 17 August 2014)] Current Developments in Lens Design and Optical Engineering XV - Employment of fluorescence for autofocusing in direct laser writing micro-/nano-lithography
Johnson, R. Barry, Mahajan, Virendra N., Thibault, Simon, Malinauskas, Mangirdas, Žukauskas, Albertas, Belazaras, KastytisVolume:
9192
Year:
2014
Language:
english
DOI:
10.1117/12.2061261
File:
PDF, 993 KB
english, 2014