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SPIE Proceedings [SPIE Electron Technology Conference 2013 - Ryn, Poland (Tuesday 16 April 2013)] Electron Technology Conference 2013 - Silicon nanowires reliability and robustness investigation using AFM-based techniques
Bieniek, Tomasz, Janczyk, Grzegorz, Janus, Paweł, Grabiec, Piotr, Nieprzecki, Marek, Wielgoszewski, Grzegorz, Moczała, Magdalena, Gotszalk, Teodor, Buitrago, Elizabeth, Badia, Montserrat F., Ionescu,Volume:
8902
Year:
2013
Language:
english
DOI:
10.1117/12.2031229
File:
PDF, 853 KB
english, 2013