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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Micro-Optics 2010 - Half-tone proximity lithography
Harzendorf, Torsten, Stuerzebecher, Lorenz, Vogler, Uwe, Zeitner, Uwe D., Voelkel, Reinhard, Thienpont, Hugo, Van Daele, Peter, Mohr, Jürgen, Zappe, HansVolume:
7716
Year:
2010
Language:
english
DOI:
10.1117/12.854307
File:
PDF, 1.66 MB
english, 2010