Evaluation of damage induced by electron-beam irradiation...

Evaluation of damage induced by electron-beam irradiation to metal-oxide semicondoctor gate pattern and method for damage-free inspection

Matsui, Miyako
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Volume:
6
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2437195
Date:
January, 2007
File:
PDF, 912 KB
english, 2007
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