[IEEE 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) - Hapuna Beach, HI, USA (2015.3.23-2015.3.26)] 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings - Wafer-scale etch process for precision frequency tuning of MEMS gyros
Kim, Dennis, Behbahani, Amir, M’closkey, Robert, Stupar, Phil, Denatale, JeffreyYear:
2015
Language:
english
DOI:
10.1109/ISISS.2015.7102391
File:
PDF, 941 KB
english, 2015