SiC In-Situ Pre-Growth Etching: A Thermodynamic Study
Neyret, E., Di Cioccio, Lea, Blanquet, Elisabeth, Raffy, C., Pudda, C., Billon, Thierry, Camassel, JeanVolume:
338-342
Year:
2000
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.1041
File:
PDF, 327 KB
english, 2000