Can ionic liquid additives be used to extend the scope of...

Journal of Micro/Nanolithography MEMS and MOEMS 2014 / 07 Vol. 13; Iss. 3

Can ionic liquid additives be used to extend the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self-assembly?

Bennett, Thomas M., Pei, Kevin, Cheng, Han-Hao, Thurecht, Kristofer J., Jack, Kevin S., Blakey, Idriss
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.13.3.031304
Date:
July, 2014
File:
PDF, 2.23 MB
english, 2014
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