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Influence of Film Thickness on Intrinsic Growth Stress and Raman Evaluation of Tetrahedral Amorphous Carbon Films
Zhu, Jia Qi, Han, Jie Cai, Meng, Song He, He, Xiao Dong, Tan, Manlin, Gao, WeiVolume:
475-479
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.475-479.3627
File:
PDF, 309 KB
english, 2005